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WHAT'S NEW..?
NanoPhotonics developed a new High Sensitivity-65nm Particle & Defect Detection System for Mask Blanks and Bare Wafers. Initial tests show a clear detection of 64nm latex spheres on bare Si-Wafers (see picture below). The system features high sensitivity, high throughput at low cost.
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Welcome to NanoPhotonics
NanoPhotonics provides defect inspection equipment for bare wafer surface, edge and back side covering a wide range of materials and substrates in semiconductor manufacturing. Our innovative modular product architecture and strong engineering capabilities allow us to react quickly to customers’ needs.

We support our customers with standard equipment as well as custom solutions:
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OUR PRODUCTS WILL MEET YOUR REQUIREMENT FOR INSPECTION ON UNPATTERNED SUBSTRATES:

Silicon wafers from 6” to 450 mm
Mask blanks
Glass wafers Compound semiconductors
Edge inspection on 200, 300 and 450 mm wafers

OUR TEAM PROVIDES
excellent know-how andexperience,
flexible answers to yourproblems,
perfect customer support
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