WHAT'S NEW..?

In October 2009 NanoPhotonics has installed two of its 450 mm wafer inspection tools to the ISMI Interoperability Test Bed, where early studies of 450 mm wafers and wafer handling equipment are underway. The tools inspect the surface and edges of 450 mm wafers for cracks, particles and other defects. read more >>

Welcome to NanoPhotonics

NanoPhotonics provides defect inspection equipment for bare wafer surface, edge and back side covering a wide range of materials and substrates in semiconductor manufacturing. Our innovative modular product architecture and strong engineering capabilities allow us to react quickly to customers’ needs.

We support our customers with standard equipment as well as custom solutions:

• Table top manual equipment
• Integrated metrology modules
• Automatic open cassette systems
• 300 mm and 450 mm FOUP based systems