NanoPhotonics - Surface inspection and edge inspection on bare semiconductor wafers NanoPhotonics - Surface and Edge Inspection for Semiconductors
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WHAT'S NEW..?

In October 2009 NanoPhotonics has installed two of its 450 mm wafer inspection tools to the ISMI Interoperability Test Bed, where early studies of 450 mm wafers and wafer handling equipment are underway. The tools inspect the surface and edges of 450 mm wafers for cracks, particles and other defects. read more >>
450 mm Defect Inspection Module with Operator

Welcome to NanoPhotonics

NanoPhotonics provides defect inspection equipment for bare wafer surface, edge and back side covering a wide range of materials and substrates in semiconductor manufacturing. Our innovative modular product architecture and strong engineering capabilities allow us to react quickly to customers’ needs.

We support our customers with standard equipment as well as custom solutions:


OUR PRODUCTS WILL MEET YOUR REQUIREMENT FOR INSPECTION ON UNPATTERNED SUBSTRATES:

Silicon wafers from 6” to 450 mm
Mask blanks
Glass wafers
Compound semiconductors
Edge inspection on 200, 300 and 450 mm wafers

OUR TEAM PROVIDES
excellent know-how andexperience,
flexible answers to yourproblems,
perfect customer support


Nanophotonics' Quality Management: ESC - Environmental and Quality Standards Certification
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