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Ricmar Beteiligungs GmbH is proud to announce that as of today it holds a majority interest in NanoPhotonics AG, which was purchased from ASM International N.V. The Ricmar group enterprises design and manufacture equipment and material for the semiconductor industry (Front- and Back end) and the NanoPhotonics defect inspection tools will complement the existing Ricmar group product portfolio. read article >> |
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Welcome to NanoPhotonics NanoPhotonics provides ultra-compact defect inspection tools for wafer front side, back side and edge in R&D, automated in-line quality monitoring, and for integrated defect inspection applications in semiconductor manufacturing. Our innovative modular product architecture, advanced defect classification software and strong engineering capabilities allow us to react quickly to customer’s needs and to provide cost effective solutions. The basis of our success is both the consistent approach to the requirements of the market, and our strong customer orientation. read more >> |
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 from large-scale productionor from R&D! dealing with Silicon wafers,compound semiconductorsor other substrate materials! searching for fullyautomated in-line equipmentor table-top devices!read more >> excellent know-how andexperience, flexible answers to yourproblems, perfect customer supportread more >> |
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The automatic stand-alone REFLEX AF EBI is designed for a 300 mm production environment. By choosing the right number and kind of inspection modules you can configure your tool on demand regarding functionality, throughput and price. Apply this tool e.g. for 100% automated outgoing quality control in wafer manufacturing. |
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| The REFLEX MC EBI is designed for smooth and space saving integration to semiconductor process tools and wafer logistic systems like wafer sorters, stockers or other inspection and metrology tools just by replacing a load port. The modular set-up allows to configure the unit either as back side inspection system, edge inspection system or combined system. In this way it is also possible to retrofit an existing production line as well as visual inspection sites in a running production. read more >> |
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