2011 NanoPhotonics ships its first AMX 6000 mask blank inspection system to a leading Asian
mask shop. The tool features high throughput and low cost of ownership.
NanoPhotonics receives a multiple order for its MC EBI integrated edge and back side
inspection tools by a leading Asian wafer manufacturer.
2010 NanoPhotonics developed a new High Sensitivity-65nm
Particle & Defect Detection System for bare wafers. The system features high sensitivity,
high throughput at low cost.
2009 NanoPhotonics releases next generation of edge
inspection technology
450 mm surface and edge inspection tools
successfully installed at ISMI
Surface defect inspection tool shipped to US based
manufacturer of advanced PV cells
Inspection tool for mask blanks shipped to leading
manufacturer of lithography equipment
2008 NanoPhotonics becomes member of the Ricmar Group www.ricmar.com
200/300 mm Glass Silicon Defect Inspection tool
shipped to major back-End of line manufacturer
2006 First REFLEX MC EBI systems for edge and back side
defect inspection delivered to leading wafer manufacturer
JANUS® combined defect inspection& ellipsometer
tool integrated to ASM's A412 vertical furnace
2004 REFLEX AF 300 mm automatic defect inspection
system shipped to Taiwanese customer
ELLIPSON MetriCube® Laser Ellipsometer integrated
to ASMJ CVD tool
2003 A joint development program with a leading Wafer
manufacturer started to develop automatic wafer back
side and edge inspection technology for 300 mm wafer
manufacturing
2002 The first REFLEX TableTop shipped to SUESS, Munich,
as a versatile cost effectiv defect inspection system.
2001 SEMICON West introduction of Ellipsometer integrated to a Brooks Automation sorter
2000 A strategic partnership with ASM has been
established with the vision to integrate NP's ultra
compact thin film and defect inspection devices into
ASM's various process tools.
1999 The Photonics Spectra Circle of Excellence Award for ELLIPSON®, the world's smallest laser ellipsometer.
1997 NP founded by Dr. Michael Abraham and Jan Melles.
