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 REFLEX TT Table Top  Defect and haze map of a mask blank  Particle map and histogram of Si calibration wafer with different size latex spheres
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REFLEX TT – TableTop Manually Loaded Wafer and Mask Blank Defect Inspection EquipmentDescriptionThe REFLEX TT (table top) is a manually loaded tool for detecting particles, scratches, area defects and micro-roughness (haze) on unpatterned wafers of various shape and diameter from 2’’ up to 300 mm and mask blanks up to 8’’ x 8’’. It employs advanced diode laser illumination and a patented optical collection system for measuring the back scattered light housed in a class 1 mini-environment. It is a very flexible tool for process characterization and contamination monitoring for R&D purposes.Features
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