NanoPhotonics - Surface inspection and edge inspection on bare semiconductor wafers
NanoPhotonics - Homepage COMPANY PRODUCTS SUPPORT NEWS JOBS CONTACT

REFLEX TT Table Top
REFLEX TT Table Top
Defect and haze map of a mask blank
Defect and haze map of a mask blank

Particle map and histogram of Si calibration wafer with different size latex spheres

Particle map and histogram of Si calibration wafer with different size latex spheres

 

REFLEX TT – TableTop Manually Loaded Wafer and Mask Blank Defect Inspection Equipment

Description

The REFLEX TT (table top) is a manually loaded tool for detecting particles, scratches, area defects and micro-roughness (haze) on unpatterned wafers of various shape and diameter from 2’’ up to 300 mm and mask blanks up to 8’’ x 8’’. It employs advanced diode laser illumination and a patented optical collection system for measuring the back scattered light housed in a class 1 mini-environment. It is a very flexible tool for process characterization and contamination monitoring for R&D purposes.

Features

  • Particle sensitivity down to 65 nm LSE
  • Laser dark field measurement technology
  • Class 1 self-contained mini-environment
  • Various wafers tables available
  • Integrated minicomputer and FPD
  • Offline analysis possible
  • Excellent correlation to known industry standards
  • Automatic defect classification software

Benefits

  • Ideal tool for process development
  • User friendly operation and GUI
  • Multiple applications use
  • Small footprint

Applications

  • Silicon
  • Glass
  • Mask blanks
  • Compound Semiconductors:
    GaAs, GaN, GaAIN
  • Transparent films on Si
  • Metal films
  • Amorphous Si / Polysilicon
  • OLED
  • Advanced Photovoltaic

 


Product overview

Front Side Inspection (FSI)

Back Side Inspection (BSI)

Edge Defect Inspection (EDI)

Combined Edge and
Back Side Inspection (EBI)

450 mm Inspection Equipment

Calibration Wafers

 

ESC - Environmental and Quality Standards Certification
Sitemap Imprint / Disclaimer
Copyright © 2010 NanoPhotonics GmbH. All rights reserved.