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REFLEX TT Table Top
Particle map and histogram of Si calibration wafer with different size latex spheres
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REFLEX TT – TableTop Manually Loaded Wafer Defect Inspection Equipment
Description
The REFLEX TT (table top) is a manually loaded tool for detecting particles, scratches, area defects and micro-roughness (haze) on unpatterned wafers of various shape and diameter from 2’’ up to 300 mm and 450 mm.
It is a very flexible tool for process characterization and contamination monitoring for R&D purposes.
Features
- Sensitivity down to 65 nm LSE on Si
- Laser dark field measurement technology
- Class 1 self-contained mini-environment
- Various wafers tables available
- Offline analysis possible
- Automatic defect classification software
Benefits
- Ideal tool for process development
- User friendly operation and GUI
- Multiple applications use
- Small footprint
- Low cost of ownership
Applications
- Silicon
- Glass
- Compound Semiconductors
- Transparent films on Si
- Metal films
- Amorphous Si / Polysilicon
- OLED
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Product overview
WAFER
Front Side Inspection (FSI)
Back Side Inspection (BSI)
Edge Defect Inspection (EDI)
Combined Edge and
Back Side Inspection (EBI)
Inspection Equipment for 450 mm Wafers
MASK BLANKS AND RETICLES
Mask Blank Inspection Equipment
PSL Calibration Wafers and Calibration Mask Blanks
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