PSL Monitoring Wafers

NanoPhotonics offers cost efficient PSL calibration standards for all Laser Surface Analyzer Systems.
The calibration standards are available in half, full or double deposition on wafers of all sizes between 2 inch (50.8mm) and 11.8 inch (300mm).
Highly mono-dispersed PSL spheres with diameters in the range 0.092µm – 3.04µm, certified by the National Institute of Standards and Technology (NIST), are deposited at very well controlled surface number densities according to our in house developed technology to ensure homogenous and non-clumping distribution on the wafer surface.

For unique specifications provided by customers, we may produce customized monitoring wafers that meet individual needs for the detection sensitivity (i.e. wafers coated with different thin layers, glass wafers, mask blanks, etc).

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