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double deposition
double deposition

PSL Monitoring Wafers

NanoPhotonics offers cost efficient PSL calibration standards for all Laser Surface Analyzer Systems.
The calibration standards are available in half, full or double deposition on wafers and mask blanks.
Highly mono-dispersed PSL spheres, certified by the National Institute of Standards and Technology (NIST), are deposited at very well controlled surface number densities according to our in house developed technology to ensure homogenous and non-clumping distribution on the wafer surface.

For unique specifications provided by customers, we may produce customized monitoring wafers that meet individual needs for the detection sensitivity (i.e. wafers coated with different thin layers, glass wafers, mask blanks, etc).

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Product overview

WAFER
Front Side Inspection (FSI)

Back Side Inspection (BSI)

Edge Defect Inspection (EDI)

Combined Edge and
Back Side Inspection (EBI)

Inspection Equipment for 450 mm Wafers

MASK BLANKS AND RETICLES
Mask Blank Inspection Equipment

PSL Calibration Wafers and Calibration Mask Blanks

ESC - Environmental and Quality Standards Certification
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