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 MetriCube® MC FSI Integrated Front Side Inspection Module
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MetriCube® MC FSI Integrated Front Side Inspection ModuleDescriptionThe MC FSI is a laser dark field Front Side Wafer Defect Inspection module detecting particles, scratches, area defects, and micro-roughness (haze) on unpatterned wafers. It employs advanced diode laser illumination and a patented optical collection system for measuring the back scattered light. The MC FSI enables to integrate defect inspection to third parties process, wafer sorting and metrology systems through its Bolts interface.Benefits
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