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 BevelCam TT Table Top  User Interface for Edge Inspection |
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BevelCam TT – Manually Loaded Edge Wafer Defect InspectionDescriptionThe BevelCam TT edge wafer defect inspection tool consists of a CCD camera system and a dark field/bright field LED illumination system. The BevelCam TT delivers information about scratches, particles, chip-outs, and contamination on the wafer edge, front & back bevels, and into 5 mm of the wafer front and back surfaces. The ADC software automatically classifies defects in these five regions without interruption.Features
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