front side inspection, edge inspection, and back side inspection on 200, 300, and 450 mm Wafers
housed in autonomous MetriCube® enclosure are the basis for automatic stand-alone applications or metrology integration into other tools and wafer logistic systems.
Automated wafer defect inspection tools with automatic open cassette platform for using it in various R&D and production environments. Bridge tool capability 4” & 6” and 6” & 8” wafers.
Manually loaded table top wafer and mask blank defect inspection tool for front side and edge inspection on wafers from 2” up to 300 mm and mask blanks for process development, R&D, application labs, and tool qualification.
