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Custom-configurable Stand-alone equipment for front side inspection, edge inspection, and back side inspection on 200, 300, and 450 mm wafers. Integrated Metrology Modules of the companies MetriCube® series for integration to process tools and wafer sorters.
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Automated wafer defect inspection and mask blank inspection tools with automatic open cassette platform for using it in various R&D and production environments. Bridge tool capability 4” & 6” and 6” & 8” wafers. |
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Manually loaded table top wafer and mask blank defect inspection tool for front side and edge inspection on wafers from 2” up to 300 mm and mask blanks for process development, R&D, application labs, and tool qualification.
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Product overview
WAFER
Front Side Inspection (FSI)
Back Side Inspection (BSI)
Edge Defect Inspection (EDI)
Combined Edge and
Back Side Inspection (EBI)
Inspection Equipment for 450 mm Wafers
MASK BLANKS AND RETICLES
Mask Blank Inspection Equipment
PSL Calibration Wafers and Calibration Mask Blanks
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