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• Product overview
WAFER
• Front Side Inspection (FSI)
• Manual Loading: REFLEX TT
• Integrated: MC FSI
• Automatic Open Cassette: AWX FSI 200
• Automatic FOUP: AWX FSI 300
• Back Side Inspection (BSI)
• Integrated: MC BSI
• Automatic FOUP: AWX BSI 300
• Edge Defect Inspection (EDI)
• Manual Loading: BevelCam TT
• Integrated: MC EDI
• Automatic FOUP: AWX EDI 300
• Combined Edge and
  Back Side Inspection (EBI)
• Integrated: MC EBI
• Automatic FOUP: AWX EBI 300
• Inspection Equipment for 450 mm Wafers
MASK BLANKS AND RETICLES
• Mask Blank Inspection Equipment
• Manual Loading: REFLEX TT MBI
• Automated Mask Inspection: AMX 6000
• PSL Calibration Wafers and Calibration Mask Blanks
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• IMPRINT / DISCLAIMER / IMPRESSUM