Sitemap
HOME
COMPANY
PRODUCTS
Product overview
WAFER
Front Side Inspection (FSI)
Manual Loading: REFLEX TT
Integrated: MC FSI
Automatic Open Cassette: AWX FSI 200
Automatic FOUP: AWX FSI 300
Back Side Inspection (BSI)
Integrated: MC BSI
Automatic FOUP: AWX BSI 300
Edge Defect Inspection (EDI)
Manual Loading: BevelCam TT
Integrated: MC EDI
Automatic FOUP: AWX EDI 300
Combined Edge and
Back Side Inspection (EBI)
Integrated: MC EBI
Automatic FOUP: AWX EBI 300
Inspection Equipment for 450 mm Wafers
MASK BLANKS AND RETICLES
Mask Blank Inspection Equipment
Manual Loading: REFLEX TT MBI
Automated Mask Inspection: AMX 6000
PSL Calibration Wafers and Calibration Mask Blanks
SUPPORT
NEWS
JOBS
CONTACT
/ Sales Representatives
IMPRINT / DISCLAIMER / IMPRESSUM
© 2011 Nanophotonics GmbH. All rights reserved.